MARC details
| 000 -LEADER |
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| fixed length control field |
03868nam a22004575i 4500 |
| 001 - CONTROL NUMBER |
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| control field |
978-0-387-09536-3 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20170628033222.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
110401s2009 xxu| s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9780387095363 |
| -- |
978-0-387-09536-3 |
| 024 7# - OTHER STANDARD IDENTIFIER |
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| Standard number or code |
10.1007/978-0-387-09536-3 |
| Source of number or code |
doi |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
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| Personal name |
Acar, Cenk. |
| Relator term |
author. |
| 245 10 - TITLE STATEMENT |
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| Title |
MEMS Vibratory Gyroscopes |
| Medium |
[electronic resource] : |
| Remainder of title |
Structural Approaches to Improve Robustness / |
| Statement of responsibility, etc |
by Cenk Acar, Andrei Shkel. |
| 264 #1 - |
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| -- |
Boston, MA : |
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Springer US, |
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2009. |
| 300 ## - PHYSICAL DESCRIPTION |
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| Extent |
XII, 260p. 131 illus. |
| Other physical details |
online resource. |
| 336 ## - |
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text |
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txt |
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rdacontent |
| 337 ## - |
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computer |
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c |
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rdamedia |
| 338 ## - |
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online resource |
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cr |
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rdacarrier |
| 347 ## - |
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text file |
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PDF |
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rda |
| 490 1# - SERIES STATEMENT |
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| Series statement |
MEMS Reference Shelf, |
| International Standard Serial Number |
1936-4407 |
| 505 0# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
Fundamentals of Micromachined Vibratory Gyroscopes -- Fundamentals of Micromachined Gyroscopes -- Fabrication Technologies -- Mechanical Design of MEMS Gyroscopes -- Electrical Design of MEMS Gyroscopes -- Structural Approaches to Improve Robustness -- Linear Multi DOF Architecture -- Torsional Multi DOF Architecture -- Distributed Mass Architecture -- Conclusions and Future Trends. |
| 520 ## - SUMMARY, ETC. |
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| Summary, etc |
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. MEMS Vibratory Gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Readers will find: A unique balance between theory and practical design issues. Comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design. Solid background Information on mechanical and electrical design, fabrication, packaging, testing and characterization. About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Mechanical engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Electronics. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Systems engineering. |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Engineering. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Electronics and Microelectronics, Instrumentation. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Circuits and Systems. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Automotive Engineering. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Mechanical Engineering. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
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| Personal name |
Shkel, Andrei. |
| Relator term |
author. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
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| Corporate name or jurisdiction name as entry element |
SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY |
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| Title |
Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
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| Display text |
Printed edition: |
| International Standard Book Number |
9780387095356 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
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| Uniform title |
MEMS Reference Shelf, |
| -- |
1936-4407 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
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| Uniform Resource Identifier |
<a href="http://dx.doi.org/10.1007/978-0-387-09536-3">http://dx.doi.org/10.1007/978-0-387-09536-3</a> |
| 912 ## - |
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ZDB-2-ENG |
