MARC details
| 000 -LEADER |
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03874nam a22004935i 4500 |
| 001 - CONTROL NUMBER |
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| control field |
978-0-387-46283-7 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20170628033318.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
100301s2008 xxu| s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9780387462837 |
| -- |
978-0-387-46283-7 |
| 024 7# - OTHER STANDARD IDENTIFIER |
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| Standard number or code |
10.1007/978-0-387-46283-7 |
| Source of number or code |
doi |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
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| Personal name |
Hesketh, Peter J. |
| Relator term |
editor. |
| 245 10 - TITLE STATEMENT |
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| Title |
BioNanoFluidic MEMS |
| Medium |
[electronic resource] / |
| Statement of responsibility, etc |
edited by Peter J. Hesketh. |
| 264 #1 - |
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| -- |
Boston, MA : |
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Springer US, |
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2008. |
| 300 ## - PHYSICAL DESCRIPTION |
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| Other physical details |
online resource. |
| 336 ## - |
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text |
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txt |
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rdacontent |
| 337 ## - |
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computer |
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c |
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rdamedia |
| 338 ## - |
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online resource |
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cr |
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rdacarrier |
| 347 ## - |
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text file |
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PDF |
| -- |
rda |
| 490 1# - SERIES STATEMENT |
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| Series statement |
MEMS Reference Shelf, |
| International Standard Serial Number |
1936-4407 |
| 505 0# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
Nanotechnology: Retrospect and Prospect -- Synthesis of Oxide Nanostructures -- Nanolithography -- Nano/Microfabrication Methods for Sensors and NEMS/MEMS -- Micro- and Nanomanufacturing via Molding -- Temperature Measurement of Microdevices using Thermoreflectance and Raman Thermometry -- Stereolithography and Rapid Prototyping -- Case Studies in Chemical Sensor Development -- Engineered Nanopores -- Engineering Biomaterial Interfaces Through Micro and Nano-Patterning -- Biosensors Micro and Nano Integration. |
| 520 ## - SUMMARY, ETC. |
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| Summary, etc |
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes: BioNanoFluidic MEMS connection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration "The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Chemistry. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Biomedical engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Hydraulic engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Systems engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Biomaterials. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Nanotechnology. |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Chemistry. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Nanotechnology. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Circuits and Systems. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Biomedical Engineering. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Engineering Fluid Dynamics. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Biophysics/Biomedical Physics. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name as entry element |
Biomaterials. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
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| Corporate name or jurisdiction name as entry element |
SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY |
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| Title |
Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
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| Display text |
Printed edition: |
| International Standard Book Number |
9780387462813 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
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| Uniform title |
MEMS Reference Shelf, |
| -- |
1936-4407 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
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| Uniform Resource Identifier |
<a href="http://dx.doi.org/10.1007/978-0-387-46283-7">http://dx.doi.org/10.1007/978-0-387-46283-7</a> |
| 912 ## - |
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ZDB-2-ENG |
