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1.
MEMS Vibratory Gyroscopes [electronic resource] : Structural Approaches to Improve Robustness / by Cenk Acar, Andrei Shkel. by Series: MEMS Reference Shelf
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: Boston, MA : Springer US, 2009 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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2.
RF MEMS Switches and Integrated Switching Circuits [electronic resource] : Design, Fabrication, and Test / by Ai-Qun Liu. by Series: MEMS Reference Shelf ; 5
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2010 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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3.
BioNanoFluidic MEMS [electronic resource] / edited by Peter J. Hesketh. by Series: MEMS Reference Shelf
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: Boston, MA : Springer US, 2008 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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4.
MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin. by Series: MEMS Reference Shelf ; 1
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2011
Other title:
  • The Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied
In: Springer eBooks
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Availability: Items available for loan: Central Library (1).

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5.
Photonic Microsystems [electronic resource] : Micro and Nanotechnology Applied to Optical Devices and Systems / by Olav Solgaard. by Series: MEMS Reference Shelf
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: Boston, MA : Springer US, 2009 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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6.
Multi-Wafer Rotating MEMS Machines [electronic resource] : Turbines, Generators, and Engines / edited by Jeffrey Lang. by Series: MEMS Reference Shelf
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2010 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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7.
MEMS Reliability [electronic resource] / by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea. by Series: MEMS Reference Shelf
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2011 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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8.
Radioisotope Thin-Film Powered Microsystems [electronic resource] / by Rajesh Duggirala, Amit Lal, Shankar Radhakrishnan. by Series: MEMS Reference Shelf ; 6
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: New York, NY : Springer New York, 2010 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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9.
Silicon Carbide Microsystems for Harsh Environments [electronic resource] / by Muthu B.J. Wijesundara, Robert Azevedo. by Series: MEMS Reference Shelf ; 22
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publisher: New York, NY : Springer New York, 2011 In: Springer eBooks
Online resources:
Availability: Items available for loan: Central Library (1).

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