000			03868nam a22004575i 4500
001			978-0-387-09536-3
003			DE-He213
005			20170628033222.0
007			cr nn 008mamaa
008			110401s2009 xxu| s |||| 0|eng d
020			_a9780387095363 _9978-0-387-09536-3
024	7		_a10.1007/978-0-387-09536-3 _2doi
100	1		_aAcar, Cenk. _eauthor.
245	1	0	_aMEMS Vibratory Gyroscopes _h[electronic resource] : _bStructural Approaches to Improve Robustness / _cby Cenk Acar, Andrei Shkel.
264		1	_aBoston, MA : _bSpringer US, _c2009.
300			_aXII, 260p. 131 illus. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aMEMS Reference Shelf, _x1936-4407
505	0		_aFundamentals of Micromachined Vibratory Gyroscopes -- Fundamentals of Micromachined Gyroscopes -- Fabrication Technologies -- Mechanical Design of MEMS Gyroscopes -- Electrical Design of MEMS Gyroscopes -- Structural Approaches to Improve Robustness -- Linear Multi DOF Architecture -- Torsional Multi DOF Architecture -- Distributed Mass Architecture -- Conclusions and Future Trends.
520			_a MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. MEMS Vibratory Gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Readers will find: A unique balance between theory and practical design issues. Comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design. Solid background Information on mechanical and electrical design, fabrication, packaging, testing and characterization. About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus
650		0	_aEngineering.
650		0	_aMechanical engineering.
650		0	_aElectronics.
650		0	_aSystems engineering.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aCircuits and Systems.
650	2	4	_aAutomotive Engineering.
650	2	4	_aMechanical Engineering.
700	1		_aShkel, Andrei. _eauthor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387095356
830		0	_aMEMS Reference Shelf, _x1936-4407
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-09536-3
912			_aZDB-2-ENG
999			_c14166 _d14166