000			03874nam a22004935i 4500
001			978-0-387-46283-7
003			DE-He213
005			20170628033318.0
007			cr nn 008mamaa
008			100301s2008 xxu| s |||| 0|eng d
020			_a9780387462837 _9978-0-387-46283-7
024	7		_a10.1007/978-0-387-46283-7 _2doi
100	1		_aHesketh, Peter J. _eeditor.
245	1	0	_aBioNanoFluidic MEMS _h[electronic resource] / _cedited by Peter J. Hesketh.
264		1	_aBoston, MA : _bSpringer US, _c2008.
300			_bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aMEMS Reference Shelf, _x1936-4407
505	0		_aNanotechnology: Retrospect and Prospect -- Synthesis of Oxide Nanostructures -- Nanolithography -- Nano/Microfabrication Methods for Sensors and NEMS/MEMS -- Micro- and Nanomanufacturing via Molding -- Temperature Measurement of Microdevices using Thermoreflectance and Raman Thermometry -- Stereolithography and Rapid Prototyping -- Case Studies in Chemical Sensor Development -- Engineered Nanopores -- Engineering Biomaterial Interfaces Through Micro and Nano-Patterning -- Biosensors Micro and Nano Integration.
520			_aBioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes: BioNanoFluidic MEMS connection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration "The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus
650		0	_aChemistry.
650		0	_aBiomedical engineering.
650		0	_aHydraulic engineering.
650		0	_aSystems engineering.
650		0	_aBiomaterials.
650		0	_aNanotechnology.
650	1	4	_aChemistry.
650	2	4	_aNanotechnology.
650	2	4	_aCircuits and Systems.
650	2	4	_aBiomedical Engineering.
650	2	4	_aEngineering Fluid Dynamics.
650	2	4	_aBiophysics/Biomedical Physics.
650	2	4	_aBiomaterials.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387462813
830		0	_aMEMS Reference Shelf, _x1936-4407
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-46283-7
912			_aZDB-2-ENG
999			_c14611 _d14611