| 000 | 03620nam a22005055i 4500 | ||
|---|---|---|---|
| 001 | 978-1-4419-7121-0 | ||
| 003 | DE-He213 | ||
| 005 | 20170628033557.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 110516s2011 xxu| s |||| 0|eng d | ||
| 020 |
_a9781441971210 _9978-1-4419-7121-0 |
||
| 024 | 7 |
_a10.1007/978-1-4419-7121-0 _2doi |
|
| 050 | 4 | _aTK7800-8360 | |
| 050 | 4 | _aTK7874-7874.9 | |
| 072 | 7 |
_aTJF _2bicssc |
|
| 072 | 7 |
_aTEC008000 _2bisacsh |
|
| 072 | 7 |
_aTEC008070 _2bisacsh |
|
| 082 | 0 | 4 |
_a621.381 _223 |
| 100 | 1 |
_aWijesundara, Muthu B.J. _eauthor. |
|
| 245 | 1 | 0 |
_aSilicon Carbide Microsystems for Harsh Environments _h[electronic resource] / _cby Muthu B.J. Wijesundara, Robert Azevedo. |
| 264 | 1 |
_aNew York, NY : _bSpringer New York, _c2011. |
|
| 300 |
_aXVI, 232 p. _bonline resource. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
||
| 347 |
_atext file _bPDF _2rda |
||
| 490 | 1 |
_aMEMS Reference Shelf, _x1936-4407 ; _v22 |
|
| 505 | 0 | _aIntroduction to Harsh MEMs -- Silicon Carbide Processing -- Silicon Carbide Electronics -- Silicon Carbide MEMS Devices -- Silicon Carbide MEMs Device Packaging -- System Integration. | |
| 520 | _a<p><em>Silicon Carbide Microsystems for Harsh Environments</em> reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation are discussed at length. The authors use the SiC technology platform suite as the model platform for developing harsh environment Microsystems, and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. This book also: </p> <ul> <li>Addresses the SiC platform for complete microsystems and goes beyond the individual device level</li> <li>Provides a comprehensive collection of SiC technologies information relevant to harsh environment microsystems</li> <li>Covers the challenges in combining SiC process and components to a microsystem</li> <li>Discusses power source and signal transmission issues in the context of the harsh environment application space </li> </ul> <p><em>Silicon Carbide Microsystems for Harsh Environments</em> not only reviews the state-of-the-art MEMS devices, but also provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.</p> | ||
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aElectronics. | |
| 650 | 0 | _aSystems engineering. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aElectronics and Microelectronics, Instrumentation. |
| 650 | 2 | 4 | _aCircuits and Systems. |
| 650 | 2 | 4 | _aNanotechnology and Microengineering. |
| 700 | 1 |
_aAzevedo, Robert. _eauthor. |
|
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9781441971203 |
| 830 | 0 |
_aMEMS Reference Shelf, _x1936-4407 ; _v22 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-1-4419-7121-0 |
| 912 | _aZDB-2-ENG | ||
| 999 |
_c15829 _d15829 |
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